Focused Ion Beam Nano-structuring of Bragg Gratings in Al2O3 Channel Waveguides


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Ay, Feridun and Uranga, Amaia and Bradley, Jonathan D.B. and Wörhoff, Kerstin and Ridder de, René M. and Pollnau, Markus (2008) Focused Ion Beam Nano-structuring of Bragg Gratings in Al2O3 Channel Waveguides. In: Proceedings of the First International Workshop on FIB for Photonics : Eindhoven, the Netherlands, 13-14 June 2008. University of Twente, Enschede, The Netherlands, pp. 48-51. ISBN 9789036526784

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Abstract:We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in Al2O3 channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.
Item Type:Book Section
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/59832
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