Focused Ion Beam Nano-structuring of Bragg Gratings in Al2O3 Channel Waveguides

Ay, Feridun and Uranga, Amaia and Bradley, Jonathan D.B. and Wörhoff, Kerstin and Ridder de, René M. and Pollnau, Markus (2008) Focused Ion Beam Nano-structuring of Bragg Gratings in Al2O3 Channel Waveguides. In: Proceedings of the First International Workshop on FIB for Photonics : Eindhoven, the Netherlands, 13-14 June 2008. University of Twente, Enschede, The Netherlands, pp. 48-51. ISBN 9789036526784

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Abstract:	We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in Al2O3 channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.
Item Type:	Book Section
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/59832
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