Seedless electroplating on patterned silicon


Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of Micromechanics and Microengineering, 16 (6). pp. 1-6. ISSN 0960-1317

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Abstract:Nickel thin films have been electrodeposited without the use of an additional
seed layer, on highly doped silicon wafers. These substrates conduct
sufficiently well to allow deposition using a peripherical electrical contact on
the wafer. Films 2 μm thick have been deposited using a nickel sulfamate
bath on both n+- and p+-type silicon wafers, where a series of trenches with
different widths had been previously etched by plasma etching. A new,
reliable and simple procedure based on the removal of the native oxide layer
is presented which allows uniform plating of patterned substrates.
Item Type:Article
Additional information:16th European Workshop on Micromechanics (MME 2005)
Copyright:© Institute of Physics
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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