Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection
Baar van, J.J. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2004) Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands.
|Abstract:||This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould
and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.
|Item Type:||Conference or Workshop Item|
|Copyright:||© 2004 STW, Technology Foundation|
Electrical Engineering, Mathematics and Computer Science (EEMCS)
|Link to this item:||http://purl.utwente.nl/publications/59581|
|Export this item as:||BibTeX|
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