Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection


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Baar van, J.J. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2004) Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands.

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Abstract:This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould
and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.
Item Type:Conference or Workshop Item
Copyright: © 2004 STW, Technology Foundation
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/59581
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