Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

Baar van, J.J. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2004) Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands.

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Abstract:	This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.
Item Type:	Conference or Workshop Item
Copyright:	© 2004 STW, Technology Foundation
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/59581
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