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Direct patterning of oxides by pulsed laser stencil deposition
Riele te, Paul Marie (2008) Direct patterning of oxides by pulsed laser stencil deposition. thesis.
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| Abstract: | This thesis describes a detailed study of the application of stencil technology in the patterning of epitaxial oxide thin films by pulsed laser deposition (PLD). Stencil patterning has been applied in thin film sub-micron patterning of metals successfully for decades since it has several advantages over lithography techniques. It is a single processing step technique which can be applied to many different types of surfaces. The stencil patterning process does not utilize any solvents which makes it a favored technique for patterning metals on fragile and/or organic materials. However, for successful stencil patterning and unlimited (re)use of stencils, several issues need to be solved. The main issues that limit the re-usability of stencils are clogging of the apertures and deformation of the stencil caused by stress induced by the deposited material. |
| Item Type: | Thesis |
| Faculty: | Science and Technology (TNW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/59468 |
| Official URL: | http://doc.utwente.nl/59468/ |
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Metis ID: 250703