Formation of Metal Nano- and Micropatterns on Self-Assembled Monolayers by Pulsed Laser Deposition Through Nanostencils and Electroless Deposition

Speets, Emiel A. and Riele te, Paul and Boogaart van den, Marc A.F. and Doeswijk, Lianne M. and Ravoo, Bart Jan and Rijnders, Guus and Brugger, Jürgen and Reinhoudt, David N. and Blank, Dave H.A. (2006) Formation of Metal Nano- and Micropatterns on Self-Assembled Monolayers by Pulsed Laser Deposition Through Nanostencils and Electroless Deposition. Advanced Functional Materials, 16 (10). pp. 1337-1342. ISSN 1616-301X

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Abstract:	Patterns of noble-metal structures on top of self-assembled monolayers (SAMs) on Au and SiO2 substrates have been prepared following two approaches. The first approach consists of pulsed laser deposition (PLD) of Pt, Pd, Au, or Cu through nano- and microstencils. In the second approach, noble-metal cluster patterns deposited through nano- and microstencils are used as catalysts for selective electroless deposition (ELD) of Cu. Cu structures are grown on SAMs on both Au and SiO2 substrates and are subsequently analyzed using X-ray photoelectron spectroscopy element mapping, atomic force microscopy, and optical microscopy. The combination of PLD through stencils on SAMs followed by ELD is a new method for the creation of (sub)-micrometer-sized metal structures on top of SAMs. This method minimizes the gas-phase deposition step, which is often responsible for damage to, or electrical shorts through, the SAM.
Item Type:	Article
Copyright:	© 2006 Wiley-VCH
Faculty:	Science and Technology (TNW)
Research Group:	Inorganic Materials Science (IMS)
Link to this item:	http://purl.utwente.nl/publications/59187
Official URL:	http://dx.doi.org/10.1002/adfm.200500933
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