Direct patterning of complex oxides by pulsed laser deposition through stencils

Riele te, Paul and Janssens, Arjen and Rijnders, Guus and Blank, Dave H.A. (2007) Direct patterning of complex oxides by pulsed laser deposition through stencils. Journal of Physics: Conference Series, 59 . pp. 404-407. ISSN 1742-6588

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Abstract:	The possibilities to grow isolated structures of complex oxides by pulsed laser deposition through stencils were investigated. A stencil consisting of a SiN membrane with apertures of several hundred nanometers embedded in a Si chip is placed in front of a heated substrate (up to 750 degrees Celsius). Deposition through these apertures results in resistless, direct patterning by local deposition of complex oxides like ferroelectric Lead Zirconate Titanate. The created isolated structures were analyzed by AFM imaging. Under-deposition, in this work called broadening, is inevitable during stencil deposition and is depending on deposition parameters, especially pressure. Different causes of broadening are mapped and discussed.
Item Type:	Article
Copyright:	© 2007 Institute of Physics
Faculty:	Science and Technology (TNW)
Research Group:	Inorganic Materials Science (IMS)
Link to this item:	http://purl.utwente.nl/publications/59182
Official URL:	http://dx.doi.org/10.1088/1742-6596/59/1/086
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