Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

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Nichols, Kevin P. and Eijkel, Jan C.T. and Gardeniers, Han J.G.E. (2008) Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels. Lab on a Chip, 2008 (8). pp. 173-175. ISSN 1473-0197

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Abstract:Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 mm, and lengths up to 3 mm, using SU-8 as the channel structural material
Item Type:Article
Copyright:© 2008 Royal Society of Chemistry
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/59069
Official URL:http://dx.doi.org/10.1039/b715917j
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Metis ID: 245015