A piezoelectric micropump based on micromachining of silicon

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Lintel van, H.T.G. and Pol van de, F.C.M. and Bouwstra, S. (1988) A piezoelectric micropump based on micromachining of silicon. Sensors and Actuators, 15 (2). pp. 153-167. ISSN 0250-6874

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Abstract:The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off).
Item Type:Article
Copyright:© 1988 Elsevier Science
Link to this item:http://purl.utwente.nl/publications/58971
Official URL:http://dx.doi.org/10.1016/0250-6874(88)87005-7
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