Back to University of Twente portal
A piezoelectric micropump based on micromachining of silicon
Lintel van, H.T.G. and Pol van de, F.C.M. and Bouwstra, S. (1988) A piezoelectric micropump based on micromachining of silicon. Sensors and Actuators, 15 (2). pp. 153-167. ISSN 0250-6874
![[img]](http://doc.utwente.nl/style/images/fileicons/application_pdf.png)
| PDF 1283Kb |
| Abstract: | The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off). |
| Item Type: | Article |
| Copyright: | © 1988 Elsevier Science |
| Link to this item: | http://purl.utwente.nl/publications/58971 |
| Official URL: | http://dx.doi.org/10.1016/0250-6874(88)87005-7 |
| Export this item as: | BibTeX EndNote HTML Citation Reference Manager |
Show download statistics for this publication
Show download statistics for this publicationRepository Staff Only: item control page