Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects


Oude Nijhuis, M.H.H. and Basten, T.G.H. and Wijnant, Y.H. and Tijdeman, H. and Tilmans, H.A.C. (1999) Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

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Abstract:The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement.
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Engineering Technology (CTW)
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