Artificial sensory hairs based on the flow sensitive receptor hairs of crickets

Dijkstra, M. and Baar van, J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Boer de, J.H. and Krijnen, G.J.M. (2005) Artificial sensory hairs based on the flow sensitive receptor hairs of crickets. Journal of Micromechanics and Microengineering, 15 (7). S132-S138. ISSN 0960-1317

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Abstract:	This paper presents the modelling, design, fabrication and characterization of flow sensors based on the wind-receptor hairs of crickets. Cricket sensory hairs are highly sensitive to drag-forces exerted on the hair shaft. Artificial sensory hairs have been realized in SU-8 on suspended SixNy membranes. The movement of the membranes is detected capacitively. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept.
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/58774
Official URL:	http://dx.doi.org/10.1088/0960-1317/15/7/019
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