Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers

Shuyi, Gan and Docter, Boudewijn and Klunder, D.J.W. and Hilderink, L.T.H. and Wörhoff, Kerstin (2002) Fabrication of low optical losses Al2O3 layer used for Er3+-doped integrated optical amplifiers. In: IEEE/LEOS Benelux Chapter 2002 Annual Symposium, December 9, 2002, Amsterdam, The Netherlands.

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Abstract:	Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/58197
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