A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides


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Altena, G. and Dijkstra, M. and Elzakker, G. van and Venhorst, G.C.F. and Hoekstra, H.J.W.M. and Lambeck, P.V. (2003) A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. In: IEEE/LEOS Benelux Chapter 2003 Annual Symposium, November 20-21, 2003, Enschede, The Netherlands (pp. pp. 25-28).

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Abstract:We report on 100nm thick free standing Silicon-nitride waveguide suspended in air used to detect MEMS movement by applying evanescent field sensing. We discuss both design and technolgical aspects for fabricating these decvces as well as experimental results on the insertion loss of realised devices.
Item Type:Conference or Workshop Item
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/58163
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