Optimization of PECVD boron-phosphorus doped silicon oxynitride for low-loss optical waveguides


Hussein, Mohamed Gamar (2007) Optimization of PECVD boron-phosphorus doped silicon oxynitride for low-loss optical waveguides. thesis.

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Abstract:Development and improvement of optical materials is one of the challenges in integrated optics, since materials issues in the fabrication of waveguiding layer structures are of great importance for getting high-quality
integrated optical components. As explained in Chapter 1, these materials must satisfy certain requirements with respect to high transparency, possibility for accurate waveguide definition, high physical, chemical, mechanical and thermal stability, compatibility with other materials used in microelectronics and fiber technology, easy processing and reasonably low cost. In particular, silicon oxynitride grown by CVD has been emerging as a
technologically reliable material for integrated optics application.
The scope of this thesis is to develop new processes for the realization of PECVD silicon oxynitride layers for use in low loss optical waveguides. A serious drawback of the chosen deposition process is the incorporation of
undesirable N-H and Si-H bonds in the layers which significantly increase the optical loss in the spectral region of interest (around 1550 nm wavelength) for
telecom applications. Phosphorus and boron doping was considered and optimized as a way to reduce the hydrogen content and the reflow temperature of the SiON layers. In order to optimize the fabrication of passive optical waveguides, a number of physical parameters of the deposited layers are characterized. Methods and experimental setups for the determination of the properties of slab-waveguides are described in chapter 2. The refractive index and the layer thickness are both determined by spectroscopic ellipsometry and prism coupler techniques. The atomic composition of the layer material is characterized by XPS and RBS. The hydrogen induced optical losses are determined by FTIR spectroscopy in the deep infrared, whereas the overtone absorption of these hydrogen bonds is measured by the prism coupler technique in the near infrared.
Item Type:Thesis
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Link to this item:http://purl.utwente.nl/publications/57857
Official URL:http://doc.utwente.nl/57857
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