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Resonating silicon beam force sensor
Blom, F.R. and Bouwstra, S. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Resonating silicon beam force sensor. Sensors and Actuators, 17 (3-4). pp. 513-519. ISSN 0250-6874
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| Abstract: | A resonating silicon-beam force sensor is being deveoped using micro-machining of silicon and IC-compatible processes. Results are reported here of measurements on the force-to-frequency transfer of bare silicon prototypes. The measurements with forces on the sensor beam up to 0.4 N shows a frequency shift of 3.1 to 5.2 times the unloaded resonance frequency f0(f0 congruent with 3 to 5 kHz), depending on the exact dimensions. Considering these figures, we can predict a frequency shift of 18.3 to 27.6 kHz at the maximum load of 1.0 N for the measured samples. Due to the sample lay-out, a force transfer is present from the externally applied force to the actual pulling force on the sensor beam. Using a simple model to calculate this reduction, we obtain good agreement between the measurements and predictions. |
| Item Type: | Article |
| Copyright: | © 1989 Elsevier Science |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/56038 |
| Official URL: | http://dx.doi.org/10.1016/0250-6874(89)80039-3 |
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