A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

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Pol, F.C.M. van de and Wonnink, D.G.J. and Elwenspoek, M. and Fluitman, J.H.J. (1989) A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices. Sensors and Actuators, 17 (1-2). pp. 139-143. ISSN 0250-6874

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Abstract:A new type of actuator for a microminiature pump is presented. The pressure of air in a cavity, raised by resistive heating, deflects a thin silicon membrane. The dynamics of membrane deflection is studied experimentally, the results being in excellent agreement with simulation. We conclude that the device is suitable as an actuator in a micro-miniature pump.
Item Type:Article
Copyright:© 1989 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/56036
Official URL:http://dx.doi.org/10.1016/0250-6874(89)80073-3
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