Quasi-buckling of micromachined beams


Lindberg, Ulf and Soderkvist, Jan and Lammerink, Theo and Elwenspoek, Miko (1993) Quasi-buckling of micromachined beams. Journal of Micromechanics and Microengineering, 3 (4). pp. 183-186. ISSN 0960-1317

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Abstract:Buckling of structures with imperfections, quasi-buckling (QB), is studied. At the bifurcation load, these structures show a smooth transition into one of the stable postbuckling equilibrium states, instead of the traditional sudden change in deflection characteristics. QB structures can show the classical snap-through buckling behaviour, i.e., a sudden change of postbuckling equilibrium state. The QB is described with a generalized temperature, Tg, representing the compression of the structure. Imperfections and distributed deflection loads are represented by a generalized pressure, pg. Experiments on micromachined beams, exposed to heating (Tg) and to a Lorentz force (pg), verify that the QB phenomena can efficiently transfer a longitudinal stress into a transversal deflection, with a scale-factor depending on both Tg and pg.
Item Type:Article
Additional information:Paper from the 4th European Workshop on Micromechanics (MME '93), 7-8 Sepember, Neuchatel, Switserland
Copyright:© Institute of Physics 1993
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/56027
Official URL:https://doi.org/10.1088/0960-1317/3/4/003
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