Miniaturised friction force measuring system for tribological research on magnetic storage devices

Burger, Johannes F. and Burger, Gert-Jan and Lammerink, Theo S.J. and Imai, Satomitsu and Fluitman, Jan H.J (1996) Miniaturised friction force measuring system for tribological research on magnetic storage devices. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA.

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Abstract:	In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological research on magnetic rigid disk storage devices. Both the tangential and radial friction forces between the slider and disk, as well as a friction induced moment, can be measured simultaneously. Furthermore the normal load on the head slider can be measured. The paper focusses on design considerations and the realisation process of the suspension. Friction measurements are included to illustrate the feasibility of the system
Item Type:	Conference or Workshop Item
Copyright:	© 1996 IEEE
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Energy, Materials and Systems (EMS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/56016
Official URL:	http://dx.doi.org/10.1109/MEMSYS.1996.493836
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