Ultrasonic transducer with thermo mechanical excitation andpiezoresistive detection


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Popescu, Dan S. and Dascalu, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1996) Ultrasonic transducer with thermo mechanical excitation andpiezoresistive detection. In: International Semiconductor Conference, CAS 1999, 9-12 October 1996, Sinaia, Romania.

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Abstract:Ultrasonic transducer was fabricated from silicon buckled membrane using a thermo mechanical excitation and piezoresistive detection. The transducer has a 4 mm square silicon membrane, buckled with an initial deflection of 20 μm, actuated by dynamically heating an aluminium ring layer, 3 μm thick, with a polysilicon ring resistor. Detection is made by measuring the piezoresistive component in the polysilicon layer impedance
Item Type:Conference or Workshop Item
Copyright:© 1996 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/55994
Official URL:http://dx.doi.org/10.1109/SMICND.1996.557311
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