Ultrasonic transducer with thermo mechanical excitation andpiezoresistive detection


Popescu, Dan S. and Dascalu, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1996) Ultrasonic transducer with thermo mechanical excitation andpiezoresistive detection. In: International Semiconductor Conference, CAS 1999, 9-12 October 1996, Sinaia, Romania (pp. pp. 85-87).

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Abstract:Ultrasonic transducer was fabricated from silicon buckled membrane using a thermo mechanical excitation and piezoresistive detection. The transducer has a 4 mm square silicon membrane, buckled with an initial deflection of 20 μm, actuated by dynamically heating an aluminium ring layer, 3 μm thick, with a polysilicon ring resistor. Detection is made by measuring the piezoresistive component in the polysilicon layer impedance
Item Type:Conference or Workshop Item
Copyright:© 1996 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/55994
Official URL:https://doi.org/10.1109/SMICND.1996.557311
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