First micromachined silicon load cell for loads up to 1000 kg


Wensink, H. and Boer, M.J. de and Wiegerink, R.J. and Zwijze, R.A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Micromachined Devices and Components IV, 21-22 September 1998, Santa Clara, CA, USA (pp. pp. 424-430).

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Abstract:In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg. ANSYS simulations were used to determine the load cell dimensions and strain gauge positions. The load cell consists of two parts, which are bonded to each other using Low Temperature Silicon Direct Bonding processes. To isolate the membrane with the sensors from lateral displacements within the load cell (e.g. expansion due to compression) thin silicon springs are incorporated in the design. To make these springs, a cryogenic RIE process with a high selectivity for resist was developed. A special housing was developed to apply a homogeneous load to the load cell. The sensor was successfully tested with loads up to 1000 kg using poly- silicon strain gauges.
Item Type:Conference or Workshop Item
Copyright:©1999 SPIE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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