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CeO2 and HfO2 high-k gate dielectrics by pulsed laser deposition : from binary oxides to nanolaminates
Karakaya, Koray (2006) CeO2 and HfO2 high-k gate dielectrics by pulsed laser deposition : from binary oxides to nanolaminates. thesis.
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| Abstract: | the selection criteria for high-k materials, the role of pulsed laser deposition in materials research activities and other major points in this thesis are presented. |
| Item Type: | Thesis |
| Link to this item: | http://purl.utwente.nl/publications/55928 |
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