Stick-slip actuation of electrostatic stepper micropositioners for data storage-the /spl mu/walker

Patrascu, Mihail and Stramigioli, Stefano (2005) Stick-slip actuation of electrostatic stepper micropositioners for data storage-the /spl mu/walker. In: International Conference on MEMS, NANO and Smart Systems, 2005.

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Abstract:	This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.
Item Type:	Conference or Workshop Item
Copyright:	© 2005 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Robotics and Mechatronics (CE)
Link to this item:	http://purl.utwente.nl/publications/55794
Official URL:	http://dx.doi.org/10.1109/ICMENS.2005.112
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