Semiconductor-based electret sensors for sound and pressure


Voorthuyzen, J.A. and Bergveld, P. and Sprenkels, A.J. (1989) Semiconductor-based electret sensors for sound and pressure. IEEE Transactions on Electrical Insulation, 24 (2). pp. 267-276. ISSN 0018-9367

open access
Abstract:The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 Hz
Item Type:Article
Copyright:©1989 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Official URL:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page