Semiconductor-based electret sensors for sound and pressure

Voorthuyzen, J.A. and Bergveld, P. and Sprenkels, A.J. (1989) Semiconductor-based electret sensors for sound and pressure. IEEE Transactions on Electrical Insulation, 24 (2). pp. 267-276. ISSN 0018-9367

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Abstract:	The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 Hz
Item Type:	Article
Copyright:	©1989 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/55745
Official URL:	http://dx.doi.org/10.1109/14.90285
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