An integrated optic adiabatic TE/TM mode splitter on silicon


Ridder, René M. de and Sander, A.F.M. and Driessen, A. and Fluitman, J.H.J. (1993) An integrated optic adiabatic TE/TM mode splitter on silicon. Journal of Lightwave Technology, 11 (11). pp. 1806-1811. ISSN 0733-8724

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Abstract:A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, is designed, using the discrete sine method (DSM) and the beam propagation method (BPM). The structures are fabricated in a system of SiO2, SiOxNy, and Si3N 4 layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing
Item Type:Article
Copyright:© 1993 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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