An integrated optic adiabatic TE/TM mode splitter on silicon

Ridder de, René M. and Sander, A.F.M. and Driessen, A. and Fluitman, J.H.J. (1993) An integrated optic adiabatic TE/TM mode splitter on silicon. Journal of Lightwave Technology, 11 (11). pp. 1806-1811. ISSN 0733-8724

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Abstract:	A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, is designed, using the discrete sine method (DSM) and the beam propagation method (BPM). The structures are fabricated in a system of SiO2, SiOxNy, and Si3N 4 layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing
Item Type:	Article
Copyright:	© 1993 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/55682
Official URL:	http://dx.doi.org/10.1109/50.251178
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