High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

Pedersen, Michael and Olthuis, Wouter and Bergveld, Piet (1998) High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter. Journal of Microelectromechanical Systems, 7 (4). pp. 387-394. ISSN 1057-7157

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Abstract:	The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon. Therefore, the structure can be realized by postprocessing on substrates containing integrated circuits (IC's), independently of the IC process, integrated microphones with excellent performances have been realized on a CMOS substrate containing dc-dc voltage converters and preamplifiers. The measured sensitivity of the integrated condenser microphone was 10 mV/Pa, and the equivalent noise level (ENL) was 27 dB(A) re. 20 ¿Pa for a power supply voltage of 1.9 V, which was measured with no bias voltage applied to the microphone. Furthermore, a back chamber of infinite volume was used in all reported measurements and simulations
Item Type:	Article
Copyright:	©1998 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/55666
Official URL:	http://dx.doi.org/10.1109/84.735346
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