Passive polarization converter in SiON technology


Koster, Ton and Lambeck, Paul V. (2001) Passive polarization converter in SiON technology. Journal of Lightwave Technology, 19 (6). pp. 876-883. ISSN 0733-8724

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Abstract:A passive polarization converter has been realized in silicon oxynitride (SiON) technology. The device is a grating assisted codirectional coupler consisting of segments of asymmetrically etched ridge waveguides. By using a double-masking technique, the fabrication of the device is tolerant with respect to the alignment of the required masks. Conversion efficiencies up to 0.98 (TE¿TM and TM¿TE) and insertion losses of 3 dB/cm have been measured. Using 2-D beam propagation method simulations, an observed beat pattern in the converter could be explained as due to a leaky mode, which is captured in the grating structure
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Copyright:©2001 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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