The CantiClever: a dedicated probe for magnetic force microscopy

Bos van den, Arnout and Heskamp, Iwan and Siekman, Martin and Abelmann, Leon and Lodder, Cock (2002) The CantiClever: a dedicated probe for magnetic force microscopy. IEEE Transactions on Magnetics, 38 (5). pp. 2441-2443. ISSN 0018-9464

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Abstract:	We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using. the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.
Item Type:	Article
Copyright:	© 2002 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Link to this item:	http://purl.utwente.nl/publications/55657
Official URL:	http://dx.doi.org/10.1109/TMAG.2002.803585
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