A miniature high-power KrF laser excited with a capacitively coupled discharge

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Gerber, T. and Bastiaens, H.M.J. and Peters, P.J.M. (1985) A miniature high-power KrF laser excited with a capacitively coupled discharge. IEEE Journal of Quantum Electronics, 21 (3). pp. 191-193. ISSN 0018-9197

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Abstract:A KrF excimer laser excited in a capacitively coupled discharge device made out of commercial BaTiO3doorknob capacitors is described. The discharge volume of 1.4 cm3is formed by a 3 mm bore into four capacitors glued together in a line. A maximal laser output energy of 1.7 mJ (1.2 J/l) in a 5.0 ns long pulse was achieved.
Item Type:Article
Copyright:©1985 IEEE
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Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/55625
Official URL:http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1072636
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