A versatile micro-scale silicon sensor/actuator with low power consumption


Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2005) A versatile micro-scale silicon sensor/actuator with low power consumption. In: 4th IEEE Conference on Sensors, 2005, 30 October - 3 November 2005, Irvine, CA, USA (pp. pp. 1225-1228).

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Abstract:We designed a CMOS compatible hot-surface silicon device operating at a power down to sub-µW. It has a pillarshaped structure with a nano-size (10-100 nm) conductive link between the electrodes separated by a SiO2 layer. The device is capable of maintaining a µm-size hot-surface area of several hundred degrees centigrade due to non-radiative recombination of carriers in a thin (13 nm) poly silicon surface layer. Such a device can be used as a light source, a heat source, as well as a sensitive detector of light and heat. As a direct application, we demonstrate the feasibility to perform as an adsorption-desorption sensor, and as a unit for activating chemisorption/decomposition (i.e. micro-reactor).
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/55326
Official URL:https://doi.org/10.1109/ICSENS.2005.1597927
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