Applications of the Microelectromechanical Systems in Nanoscience


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Deladi, S. and Sarajlic, E. and Kuijpers, A.A. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Applications of the Microelectromechanical Systems in Nanoscience. In: II Eccomas Thematic Conference on Smart Structures and Materials, 18-21 July, 2005, Lisboa, Portugal.

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Abstract:The miniaturization and development of complex Micro Electro Mechanical Systems (MEMS) led to a need for an increase in performance of such systems in terms of displacement range, accuracy, velocity etc. There is a huge potential of using them as tools in nanonoscience such as high-density probe memory applications, scanning probe microscopy (e.g. nanolithography, prototyping of nanostructures), bio-physical applications (e.g. cell stimulation and monitoring), chemistry (e.g. trapping molecules in nano-gaps for further analysis). Recent development of such MEMS devices in the Transducers Science and Technology group, as well as experimental testing in different nano-scale related applications are presented. The work focuses on bidirectional and 2DOF (two degrees of freedom) microactuator stages, nano-positioning systems, and development of atomic force microscopy based applications and characterization techniques.
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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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