Bidirectional electrostatic linear shuffle motor with two degrees of freedom


Sarajlic, E. and Berenschot, E. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 391-394).

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Abstract:We report on an electrostatic linear inchworm micromotor with two translational degrees-of-freedom. The motor employs built-in mechanical leverage to convert normal deflection of a flexible cross-plate into a small in-plane step and four electrostatic clamps to enable bidirectional inchworm motion in two orthogonal directions. The motor is realized in a relative simple fabrication process, which combines conventional surface micromachining with trench isolation. Operation in different stepping modes (fill, half and diagonal step) accompanied with high overall performance characteristics such as large force (0.64 mN) at moderate voltage (45V plate and 36V clamp), adjustable nanometer-resolution step size (41 nm to 63 nm), broad cycling frequency range (0 to SO kHZ), small dimension (482 pm x 482 pm) and large displacement range, makes this inchworm motor an attractive candidate for demanding positioning applications e.g. for (probe based) data storage.
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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