Micromachined capacitive displacement sensor for long-range nano-positioning


Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko C. (2005) Micromachined capacitive displacement sensor for long-range nano-positioning. In: International Probe Storage Workshop III , Feb. 28 - Mar. 1, 2005, Zürich, Switzerland.

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Abstract:Integrated long-range position sensing with high accuracy will be of paramount importance for high-potential applications in a.o. future probe-based datastorage and microscopy applications [1], provided that nm position accuracy can be obtained over a range of tens of micrometers or more. This work presents the design, fabrication and measurements for an integrated incremental capacitive long-range position sensor for nano-positioning of microactuators. For compactness, economical viability and optimal performance, the aim has been to fully integrate sensor and actuator through micromachining technology, without additional micro-assembly. Two related concepts are presented and evaluated through analysis, 2D-Finite-Element Simulations and experimental assessment. The sensors consist of two periodic geometries (period ≈ 8-16μm) on resp. a slider, movable in x-direction, and sense-structures, movable in y-direction, at both sides of the slider, Fig. 1. In ICMM the displacement of the slider is measured by measuring the periodic change in capacitance ΔCs(x) with a charge-amplifier and synchronous detection technique [2]. Using sense-actuators, the gap-distance between sense-structures and slider is made smaller than is possible with standard available photo-lithography (< 2 μm), thus increasing the capacitance and the S-N Ratio.
Item Type:Conference or Workshop Item
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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