Radio frequency power sensor based on MEMS technology with ultra low losses

Fernandez, Luis and Sesé, J. and Wiegerink, Remco and Flokstra, Jaap and Jansen, Henri and Elwenspoek, Miko (2005) Radio frequency power sensor based on MEMS technology with ultra low losses. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA.

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Abstract:	A wideband 100 kHz-4 GHz power sensor, of which the basic design was presented recently by L. J. Fernandez et al. (2004), was successfully realized. The sensor is based on sensing the electrical force between the RF signal line and a suspended membrane. Optimization of the design with SONNET has resulted in measured reflection losses (S11) less than -30 dB, transmission losses (SI2) better than -0.2 dB, and a sensitivity of 80 aF/mW.
Item Type:	Conference or Workshop Item
Copyright:	©2005 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/54399
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2005.1453899
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