Cryogenic imaging X-ray spectrometer


Share/Save/Bookmark

Wiegerink, R.J. and Baar, J.J. van and Boer, J.H. de and Ridder, M.L. and Bruijn, M.P. and Germeau, A. and Hoevers, H.F.C. (2005) Cryogenic imaging X-ray spectrometer. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 56-59).

open access
[img]
Preview
PDF
863kB
Abstract:A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/54398
Official URL:http://dx.doi.org/10.1109/MEMSYS.2005.1453866
Export this item as:BibTeX
EndNote
HTML Citation
Reference Manager

 

Repository Staff Only: item control page

Metis ID: 228532