Cryogenic imaging X-ray spectrometer


Wiegerink, R.J. and Baar, J.J. van and Boer, J.H. de and Ridder, M.L. and Bruijn, M.P. and Germeau, A. and Hoevers, H.F.C. (2005) Cryogenic imaging X-ray spectrometer. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 56-59).

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Abstract:A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 228532