Arrays of cricket-inspired sensory hairs with capacitive motion detection


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Baar van, J. and Dijkstra, M. and Wiegerink, R. and Lammerink, T. and Boer de, R. and Krijnen, G. (2005) Arrays of cricket-inspired sensory hairs with capacitive motion detection. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS, Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA.

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Abstract:This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/54397
Official URL:http://dx.doi.org/10.1109/MEMSYS.2005.1454012
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