Arrays of cricket-inspired sensory hairs with capacitive motion detection


Baar, J. van and Dijkstra, M. and Wiegerink, R. and Lammerink, T. and Boer, R. de and Krijnen, G. (2005) Arrays of cricket-inspired sensory hairs with capacitive motion detection. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS, Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 646-649).

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Abstract:This paper presents the fabrication of flow-sensors based on the drag-force induced motion of artificial hairs connected to capacitive read-out. Artificial hairs were made either out of moulded silicon-nitride structures or by SU-8. The SU-8 hairs were suspended on membranes containing electrodes to form the variable capacitors. Silicon-rich-nitride hairs were made using a silicon wafer as a dissolvable mould. The longest SU-8 hairs were fabricated using a 470 /spl mu/m thick photoresist layer. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been carried out on entire arrays and are reported in this paper
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Copyright:© 2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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