Micromachined Foutain Pen as a tool for Atomic Force Microscopebased nanoelectrochemical metal deposition

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Boer de, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. and Boer de, J.H. (2005) Micromachined Foutain Pen as a tool for Atomic Force Microscopebased nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA.

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Abstract:	We present a device that enables nanoelectrochemical deposition using Atomic Force Microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes pIace. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeedded depositing with this technique up till now are 3 nm high and 250 nm wide.
Item Type:	Conference or Workshop Item
Copyright:	© 2005 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/54369
Official URL:	http://dx.doi.org/10.1109/MEMSYS.2005.1453992
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