Fabrication of access holes to 2D nanochannels for single molecules experiment [poster]

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Hoang, Thi Hanh and Berenschot, J.W. and Tas, Niels R. and Elwenspoek, Miko C. (2005) Fabrication of access holes to 2D nanochannels for single molecules experiment [poster]. In: NanoTech Montreux, November 15-17, 2005, Montreux, Switzerland.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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