AlN thin film unimorph piezoelectric actuators on polysilicon microbridges

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Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

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