A Three Dimensional Microflown


Yntema, D.R. and Honschoten, J.W. van and Bree, H-E. de and Wiegerink, R.J. and Elwenspoek, M.C. (2006) A Three Dimensional Microflown. In: IEEE 19th annual International Conference on Micro Electro Mechanical Systems, MEMS, 22-26 January 2006, Istanbul, Turkey (pp. pp. 654-657).

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Abstract:An integrated three dimensional acoustic particle velocity sensor is realized. The integration of multiple sensors on a single silicon die leads to improvements in terms of better a better reproducible sensor and a very small sensor to sensor distance allowing accurate single point measurements. Initial measurements performed show that three dimensional noise source finding is possible with this sensor.
Item Type:Conference or Workshop Item
Copyright:© 2006 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/54337
Official URL:https://doi.org/10.1109/MEMSYS.2006.1627884
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