Microfabrication and integration


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Gardeniers, J.G.E. and Berg, A. van den (2005) Microfabrication and integration. In: Separation methods in microanalytical systems. CRC Taylor & Francis, Boca Raton, USA, pp. 55-106. ISBN 9780824725303

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Item Type:Book Section
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Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 224633