Microfabrication and integration

Gardeniers, J.G.E. and Berg van den, A. (2005) Microfabrication and integration. In: Separation methods in microanalytical systems. CRC Taylor & Francis, Boca Raton, USA, pp. 55-106. ISBN 9780824725303

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Item Type:	Book Section
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/52846
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Metis ID: 224633