High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology

Sarajlic, E. and Berenschot, E. and Tas, N. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea.

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Abstract:	We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 μm × 286 μm, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was ±70 μm, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34· $10^9$ steps without any performance deterioration.
Item Type:	Conference or Workshop Item
Copyright:	© 2005 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/52579
Official URL:	http://dx.doi.org/10.1109/SENSOR.2005.1496357
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