High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology


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Sarajlic, E. and Berenschot, E. and Tas, N. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea.

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Abstract:We report on an electrostatic linear micromotor, which employs built-in mechanical leverage to convert normal deflection of a flexible plate into a small in-plane step and two clamps to enable bidirectional inchworm motion. The motor, measuring 412 μm × 286 μm, is fabricated by a combination of trench isolation technology and standard surface micromachining in a relative simple process. The maximum achieved travel range was ±70 μm, limited only by flexure design. Depending on the plate actuation voltage, two operation modes, below and above pull-in of the plate, are demonstrated with an adjustable step size from 0.6 to 7 nm and 49 to 62 nm, respectively. The motor was driven in a broad cycling frequency range from 0 to 80 kHz. Output forces of 1.7 mN are measured at 55 V for both the clamps and plate. The motor was operated for 5 days at a stepping frequency of 80 kHz and has completed a cumulative distance of more than 1500 m in about 34·$10^9$ steps without any performance deterioration.
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/52579
Official URL:http://dx.doi.org/10.1109/SENSOR.2005.1496357
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