Multifunctional Tool for Expanding AFM-Based Applications


Deladi, S. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Multifunctional Tool for Expanding AFM-Based Applications. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 159-162).

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Abstract:A multifunctional tool which expands the application field of atomic force microscope-based surface modification is presented. The AFM-probe can be used for surface modification and in-situ characterization at the same time, due to a special configuration with two cantilevers. Various applications from different fields are presented, which were carried out with one and the same tool: in-situ characterization of wear generated with and without local lubrication (tribology), fountain-pen lithography in which material is deposited or removed (physical chemistry), and electrochemical metal deposition (electrochemistry).
Item Type:Conference or Workshop Item
Copyright:©2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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