Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane

Tong, H.D. and Berg van den, A.H.J. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane. Thin Solid Films, 479 . pp. 89-94. ISSN 0040-6090

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Abstract:	Abstract Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium.
Item Type:	Article
Copyright:	© 2004 Elsevier B.V.
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/51079
Official URL:	http://dx.doi.org/10.1016/j.tsf.2004.11.179
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