Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane

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Tong, H.D. and Berg, A.H.J. van den and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane. Thin Solid Films, 479 . pp. 89-94. ISSN 0040-6090

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Abstract:Abstract
Submicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium.
Item Type:Article
Copyright:© 2004 Elsevier B.V.
Faculty:
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/51079
Official URL:http://dx.doi.org/10.1016/j.tsf.2004.11.179
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