Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation


Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, Henri V. and Berenschot, J.W. and Boer, Meint J. de and Boer, J.H. de and Rijn, Cees J.M. van and Elwenspoek, Miko C. (2005) Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation. Journal of Microelectromechanical Systems, 14 . pp. 113-123. ISSN 1057-7157

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Abstract:A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H/sub 2//m/sup 2//spl middot/s with a minimal selectivity of 1500 for hydrogen over helium (H/sub 2//He) at 450/spl deg/C and 83 kPa H/sub 2/ retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.
Item Type:Article
Copyright:© 2005 IEEE
Science and Technology (TNW)
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/51078
Official URL:https://doi.org/10.1109/JMEMS.2004.839005
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