Strategies to Cope with Plasma Charging Damage in Design and Layout Phases


Wang, Z. and Ackaert, J. and Scarpa, A. and Salm, C. and Kuper, F.G. and Vugts, M. (2005) Strategies to Cope with Plasma Charging Damage in Design and Layout Phases. In: International Conference on Integrated Circuit Design and Technology, ICICDT, 9-11 May 2005, Austin, Texas, USA (pp. pp. 91-98).

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Abstract:In this paper, strategics to cope with plasma charging damage in design and layout phases are discussed. A semi-empirical model is addressed first. With this model, a designer is able to predict the plasma charging induced yield loss of the circuit, if the antenna ratio (AR) distribution of the circuit is available. Then a novel first order self-balancing interconnect layout design is proposed to reduce the plasma charging damage. Moreover, the temperature effect on the protection diode is discussed and a strategic diode protection scheme for plasma charging damage is proposed. In addition to these general methods, a set of design rules is given to protect floating metal-insulator-metal (MIM) capacitors from plasma charging damage.
Item Type:Conference or Workshop Item
Copyright:© 2005 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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