Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry

Oosterbroek, R.E. and Hermes, D.C. and Kakuta, M. and Benito-Lopez, F. and Verboom, W. and Gardeniers, J.G.E. and Berg van den, A. and Reinhoudt, D.N. (2006) Fabrication and mechanical testing of glass chips for high pressure synthetic or analytical chemistry. Microsystem Technologies, 12 (5). pp. 450-454. ISSN 0946-7076

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Abstract:	The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.
Item Type:	Article
Copyright:	© 2006 Springer
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Molecular Nanofabrication (MNF) Mesoscale Chemical Systems (MCS) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/51046
Official URL:	http://dx.doi.org/10.1007/s00542-005-0043-5
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