Alignment issues in photonic crystal device fabrication


Ridder, René M. de and Bostan, Cazimir G. and Soest, Frank J. van and Gadgil, Vishwas J. (2004) Alignment issues in photonic crystal device fabrication. In: 6th International Conference on Transparent Optical Networks, ICETON 2004, 4-8 July, 2004, Wroclaw, Poland (pp. pp. 260-266).

open access
Abstract:An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.
Item Type:Conference or Workshop Item
Copyright:© 2004 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:
Official URL:
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 220625