Alignment issues in photonic crystal device fabrication

Ridder de, René M. and Bostan, Cazimir G. and Soest van, Frank J. and Gadgil, Vishwas J. (2004) Alignment issues in photonic crystal device fabrication. In: 6th International Conference on Transparent Optical Networks, 2004, 4-8 July, 2004, Wroclaw, Poland.

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Abstract:	An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure.
Item Type:	Conference or Workshop Item
Copyright:	© 2004 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/48851
Official URL:	http://dx.doi.org/10.1109/ICTON.2004.1360289
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