Flash-release - an alternative for releasing complex MEMS devices

Deladi, S. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash-release - an alternative for releasing complex MEMS devices. Journal of Micromechanics and Microengineering, 14 (12). pp. 1659-1664. ISSN 0960-1317

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Abstract:	A novel time-saving and cost-effective release technique has been developed and is described. The physical nature of the process is explained in combination with experimental observations. The results of the flash release process are compared with those of freeze-drying and supercritical CO2 releasing. It is demonstrated that the new technique is not only simpler but it also gives better yield for long cantilevers. Furthermore, it is shown that the process can be used successfully for complex MEMS devices that consist of multiple-structural layers, but which do not contain membrane-like structures.
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited 2004
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/48481
Official URL:	http://dx.doi.org/10.1088/0960-1317/14/12/009
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