Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuators

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Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuators. Journal of Micromechanics and Microengineering, 14 (9). S31-S36. ISSN 0960-1317

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Abstract:Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.
Item Type:Article
Additional information:SPECIAL ISSUE FEATURING PAPERS FROM THE 14TH MICROMECHANICS EUROPE WORSHOP (MME'03)
Copyright:© Institute of Physics and IOP Publishing Limited 2004
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/48479
Official URL:http://dx.doi.org/10.1088/0960-1317/14/9/005
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