Analytic model of a two wire thermal sensor for flow and sound measurements


Honschoten, J.W. van and Krijnen, G.J.M. and Svetovoy, V.B. and Bree, H.E. de and Elwenspoek, M.C. (2004) Analytic model of a two wire thermal sensor for flow and sound measurements. Journal of Micromechanics and Microengineering, 14 (11). pp. 1468-1477. ISSN 0960-1317

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Abstract:The Microflown is an acoustic sensor that measures particle velocity instead of pressure, as conventional microphones do. This paper presents an analytical model describing the physical processes that govern the behaviour of the sensor and determine its sensitivity. Forced convection by an acoustic wave causes a small, asymmetrical, perturbation to the temperature profile around the two heated wires of the sensor, so that a temperature difference between these wires occurs. This temperature difference, to which the sensitivity is proportional, is calculated with a perturbation theory. Subsequently the frequency-dependent behaviour of the sensitivity can be analysed; it is found that there are two important corner frequencies, the first related to the time constant of heat diffusion, and the second related to the heat capacity of the heaters.
Item Type:Article
Copyright:© Institute of Physics and IOP Publishing Limited 2004
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 219960