Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM)

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Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM). In: 4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004, 28-29 September 2004, Aachen, Germany.

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 219751