Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM)

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM). In: 4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004, 28-29 September 2004, Aachen, Germany.

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/48360
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page

Metis ID: 219751